Luke studies laser damage and optical instrumentation techniques. He finished a Ph.D with Joey’s group in May 2016, and subsequently performed a stint as postdoc. His thesis included a study of the effect of film crystallinity on laser damage as well as the design of a high-speed thermal measurement system using digital holography. Currently, Luke is interested in optical metrology, computer vision and optical device design and simulation.
Dr. Taylor is now with Ball Aerospace in Albuquerque, NM.
High temperature microheaters have been designed and constructed to reduce the background thermal emission radiation produced by the heater. Such heaters allow one to probe luminescence with very low numbers of photons where the background emission would overwhelm the desired signal. Two methods to reduce background emission are described: one with low emission materials and the other with interference coating design. The first uses platforms composed of material that is transparent to mid-infrared light and therefore of low emissivity. Heating elements are embedded in the periphery of the heater. The transparent platform is composed of aluminum oxide, which is largely transparent for wavelengths less than about 8 μ m. In the luminescent microscopy used to test the heater, an optical aperture blocks emission from the heating coils while passing light from the heated objects on the transparent center of the microheater. The amount of infrared light transmitted through the aperture was reduced by 90% as the aperture was moved from the highly emissive heater coils at 450 ^∘C to the largely transparent center at the same temperature. The second method uses microheaters with integrated multilayer interference structures designed to limit background emission in the spectral range of the low-light luminescence object being measured. These heaters were composed of aluminum oxide, titanium dioxide, and platinum and were operated over a large range of temperatures, from 50 ^∘C to 600 ^∘C. At 600 ^∘C, they showed a background photon emission only 1/800 that of a comparison heater without the multilayer interference structure. In this structure, the radiation background was sufficiently reduced to easily monitor weak thermoluminescent emission from CaSO 4 :Ce,Tb microparticles.
To the uninitiated, the phrase “optical microelectromechanical systems”or optical MEMS must appear to refer to a field of incredible specialization. Ironically, the number of disciplines involved, optics, mechanics, and electronics, make the field most accessible to scientists of great technical breadth. This is especially true when optical MEMS is used in chemical and biological applications - the theme of this text. Underlying all of them is the technology of microfabrication. One chapter could not possibly cover all of the techniques developed over the decades for very-large-scale integration (VLSI) and general MEMS systems. Indeed there are entire textbooks devoted specifically to both types. In this chapter then, we present the characteristics of fabrication and design that are specific to bring optics into the system. In particular, there are a number of materials and fabrication techniques that are specific to optical MEMS systems. When dealing with light, one may have to handle visible, ultraviolet, or infrared portions of the spectrum, each of which has its own special set of optimal substances. Since one often has to emit light or detect it in special wavelength regions, semiconductors other than silicon often must be incorporated, each with their own set of wet and dry chemical etching techniques and their own set of mechanical properties. Standard mechanical characteristics that play no role in “normal”MEMS systems may prove problematic in optical MEMS. For example small size may lead to diffraction, typical surface roughness may limit optical cavity resolution, and mechanical or motion may deform mirrors to limit the number of resolvable spots. Even thermal noise may place limits on optical design. Each of these topics is covered in the pages that follow. For the reader who is interested in further exploring many of these areas, we recommend the text by Solgaard.
Laser damage is a primary limiting factor to the design of high-power laser systems. This is true for short-pulse systems as well as long-pulse and continuous-wave (CW) systems. Unlike short-pulse laser damage, CW laser damage has been much less studied. This work comprises a background of laser damage and laser heating theory, a CW laser damage experiment and an imaging technique for monitoring laser heating. The damage experiment was performed on 100 nm thick hafnia coatings deposited on fused silica. Uniformly grown films were compared to hafnia-alumina nanolaminates. While the nanolaminates are known to perform better for 1 ns pulses, we found they had worse laser damage performance in the CW regime. We found the nanolaminates reduced crystallinity. The polycrystalline uniform films are thought to have increased absorption. We measured the thermal conductivity of the nanolaminates to be approximately 1/2 that of the uniform films. A theoretical model including the absorption and thermal conductivity of the nanolaminate and uniform film agreed with the experimental data for 1 ns pulses and CW tests. During laser damage experiments, anomalous damage morphologies were observed that we were unable to explain with theoretical techniques. We then developed an experimental method to observe high-speed laser damage events at the ms time-scale. We imaged laser heating and compared it to a theoretical model with good agreement. Our measurement method captured image data from a Mach-Zender interferometer that had do be processed ex-situ. We desired a system capable of providing real-time thermal data. We developed an image processing technique at least 66 times faster than the original method.
A subsampling technique for real-time phase retrieval of high-speed thermal signals is demonstrated with heated metal lines such as those found in microelectronic interconnects. The thermal signals were produced by applying a current through aluminum resistors deposited on soda–lime–silica glass, and the resulting refractive index changes were measured using a Mach–Zehnder interferometer with a microscope objective and high-speed camera. The temperatures of the resistors were measured both by the phase-retrieval method and by monitoring the resistance of the aluminum lines. The method used to analyze the phase is at least 60\texttimes faster than the state of the art but it maintains a small spatial phase noise of 16 nm, remaining comparable to the state of the art. For slowly varying signals, the system is able to perform absolute phase measurements over time, distinguishing temperature changes as small as 2 K. With angular scanning or structured illumination improvements, the system could also perform fast thermal tomography.
This paper describes the physical processes that occur when high-power continuous-wave laser light interacts with absorbing particles on a low-absorption optical surface. When a particulate-contaminated surface is illuminated by high-power continuous-wave laser light, a short burst of light is emitted from the surface, and the particles rapidly heat over a period of milliseconds to thousands of degrees Celsius, migrating over and evaporating from the surface. The surviving particles tend to coalesce into larger ones and leave a relatively flat residue on the surface. The total volume of the material on the surface has decreased dramatically. The optical surface itself heats substantially during illumination, but the surface temperature can decrease as the material is evaporated. Optical surfaces that survive this process without catastrophic damage are found to be more resistant to laser damage than surfaces that have not undergone the process. The surface temperature of the conditioned surfaces under illumination is lower than that of unconditioned surfaces. These conditioning effects on particles occurred within the first 30 s of laser exposure, with subsequent laser shots not affecting particle distributions. High-speed photography showed the actual removal and agglomeration of individual particles to occur within about 0.7 ms. Elemental changes were measured using time-of-flight secondary ion mass spectroscopy, with conditioned residuals being higher in hydrocarbon content than pristine particles. The tests in this study were conducted on high-reflectivity distributed Bragg reflector coated optics with carbon microparticles in the size range of 20–50 μm, gold particles of size 250 nm, and silica 1 μm in size.
We present a technique for high-speed imaging of the dynamic thermal deformation of transparent substrates under high-power laser irradiation. Traditional thermal sensor arrays are not fast enough to capture thermal decay events. Our system adapts a Mach-Zender interferometer, along with a high-speed camera to capture phase images on sub-millisecond time-scales. These phase images are related to temperature by thermal expansion effects and by the change of refractive index with temperature. High power continuous-wave and long-pulse laser damage often hinges on thermal phenomena rather than the field-induced effects of ultra-short pulse lasers. Our system was able to measure such phenomena. We were able to record 2D videos of 1 ms thermal deformation waves, with 6 frames per wave, from a 100 ns, 10 mJ Q-switched Nd:YAG laser incident on a yttria-coated glass slide. We recorded thermal deformation waves with peak temperatures on the order of 100 degrees Celsius during non-destructive testing.
Thermal effects in optical substrates are vitally important in determining laser damage resistance in long-pulse and continuous-wave laser systems. Thermal deformation waves in a soda-lime-silica glass substrate have been measured using high-speed interferometry during a series of laser pulses incident on the surface. Two-dimensional images of the thermal waves were captured at a rate of up to six frames per thermal event using a quantitative phase measurement method. The system comprised a Mach–Zehnder interferometer, along with a high-speed camera capable of up to 20,000 frames-per-second. The sample was placed in the interferometer and irradiated with 100 ns, 2 kHz ⬚⬚-switched pulses from a high-power Nd:YAG laser operating at 1064 nm. Phase measurements were converted to temperature using known values of thermal expansion and temperature-dependent refractive index for glass. The thermal decay at the center of the thermal wave was fit to a function derived from first principles with excellent agreement. Additionally, the spread of the thermal distribution over time was fit to the same function. Both the temporal decay fit and the spatial fit produced a thermal diffusivity of 5\texttimes10E-7\, m^2/s.
Infrared-transparent microheaters have been constructed to reduce the background blackbody radiation produced by the heater. Among other applications, such heaters allow one to probe the high temperature peaks of thermoluminescent(TL) materials. The microheater consists of peripheral platinum heating elements on a mid-infrared transparent alumina platform. Alumina has a relatively low blackbody signal at high temperature for wavelengths less than 8μm. To test the reduced blackbody emission, an aperture was placed over the heating coils and then the transparent center of the microheater. The amount of infrared light transmitted through the aperture was reduced by 90% as the aperture moved from the highly emissive heater coils at 450^∘C to the largely transparent center at the same temperature.
The laser-damage thresholds of single material and nanolaminate thin films were compared under continuous-wave (CW) illumination conditions. Nanolaminate films consist of uniform material interrupted by the periodic insertion of one or more atomic layers of an alternative material. Hafnia and titania were used as the base materials, and the films were deposited using atomic-layer deposition. The nanolaminates were less polycrystalline than the uniform films, as quantified using x-ray diffraction. It was found that the nanolaminate films had reduced laser-damage thresholds on smooth and patterned substrates as compared to uniform single-material films. This behavior is unusual as prior art indicates that amorphous (less polycrystalline) materials have higher laser-damage thresholds under short-pulse excitation. It is speculated that this may indicate that local thermal conduction affects breakdown more strongly under CW excitation than the dielectric properties that are important for short-pulse excitation.
The laser-damage thresholds of single material and nanolaminate thin films were compared under continuous-wave (CW) illumination conditions. Nanolaminate films consist of uniform material interrupted by the periodic insertion of one or more atomic layers of an alternative material. Hafnia and titania were used as the base materials, and the films were deposited using atomic-layer deposition. The nanolaminates were less polycrystalline than the uniform films, as quantified using x-ray diffraction. It was found that the nanolaminate films had reduced laser-damage thresholds on smooth and patterned substrates as compared to uniform single-material films. This behavior is unusual as prior art indicates that amorphous (less polycrystalline) materials have higher laser-damage thresholds under short-pulse excitation. It is speculated that this may indicate that local thermal conduction affects breakdown more strongly under CW excitation than the dielectric properties that are important for short-pulse excitation.
We compared the laser damage performance of uniform versus nanolaminate thin films for hafnia and titania-based coatings. Our experiments showed that the films with higher crystallinity appeared to have better performance for CW systems.