Phil Armstrong received the B.S. degree (cum laude) in electrical engineering from St. Cloud State University in 2007. He defended his Ph.D thesis in July 2017, centering on the deposition of luminescent thin films and the use of MEMS devices to characterize these materials. After graduation, Dr. Armstrong stayed on to guide an ongoing project as a post-doctoral associate, before departing in 2018.
In his free time, he enjoys computer gaming and science fiction.
Typically when microsensor particles are used to monitor temperatures in harsh environments, a statistical number of particles are collected and measured in aggregate. While this method is undoubtedly the most practical method for the rapid acquisition of overall temperature data, the limitations of collective measurements of numbers of particles versus individual ones has never been explored. In this paper, the thermoluminescent (TL) magnesium borate microparticles are used to measure temperatures inside the periphery of explosions with collective and individual behavior contrasted. It is found that individual measurement indicate that some particles undergo extreme temperature while others seem to have had no exposure to high temperature at all. The microparticles were irradiated with 200Gy of gamma radiation to fill the traps in the band gap. Several grams of the irradiated microparticles were placed at various distances from the source of the detonation. After the microparticles were collected the TL curve was measured for microparticles that were in the detonation and a control group of microparticles not in the detonation. The TL curve of an individual microparticle was measured by placing the microparticle ranging in size from 25 μm to 75 μm on a microheater with an area of 300 μm \texttimes 300 μm. The microheater was then used to heat the microparticle at a linear rate while the thermoluminescence of the microparticle was measured. A summation of first-order kinetics curves were used to do a fit to the thermoluminescence curves of the microparticles that were in the detonation and the control group. By comparing the ratio of first-order kinetic curve peaks of the particles that were in the detonation to the control group the temperature that the particles in the explosion were calculated. This process was carried out for many different particles that were in the same detonation and collected from the same location in the explosive test chamber. Individual extracted temperatures from the microparticles show a large distribution ranging from room temperature to 516^∘C, but in aggregate, the microparticles show a clustering of temperatures around 290^∘C.
The measurement of glow curves from thermoluminescent materials has had important applications in geological/archeological dating and radiation dosimetry. A method for using thermoluminescent materials in a temperature sensing application will be described in this thesis. Thermoluminescence is a process by which an ionizing radiation source excites carriers that eventually settle into trap states. Thermal energy due to a temperature profille is then used to empty the carriers from these trap states allowing them to radiatively recombine. Measuring the thermoluminescent intensity versus temperature is called a glow curve and contains information about the traps in wide bandgap (> 5.5eV) insulating materials. One such material, yttrium oxide with a terbium impurity, was deposited as a thin film on a silicon substrate in order to characterize the use of lanthanides in a insulating host material for thermoluminescent applications. Lanthanides can act as both a trap and recombination center. Eventually microparticles of lanthanide doped magnesium borate and calcium sulfate where determined to be the best samples for testing. When the microparticles of magnesium borate or calcium sulfate are exposed to a temperature profile like those that occur during explosives testing the filled trap density will decrease different amounts depending on the physical properties of a given trap. The temperature profile can be calculated by comparing the altered glow curve of a sample that experienced the explosive event to the glow curve of a sample that was not in the explosive event, this technique has been shown to be effective in measuring temperatures up to just above 500C. The limitation in maximum temperature is in large part due to the maximum temperature possible during a glow curve measurement before thermal emission from the heat source overwhelms the thermoluminescence of the sample. To combat this parasitic thermal emission, and extend the usable temperature range of this sensing technique, two methods are demonstrated to reduce thermal emission. The first method uses a microheater with the metal heating element placed around the perimeter and an aperture placed over the center where a thermoluminescent microparticle is placed blocking thermal emission from the heating element but allowing the light from the microparticle to escape. The second method deposits a distributed Bragg reflector on the top and bottom of a microheater which reduces its emissivity at wavelengths that match the microparticle emission spectrum.
High temperature microheaters have been designed and constructed to reduce the background thermal emission radiation produced by the heater. Such heaters allow one to probe luminescence with very low numbers of photons where the background emission would overwhelm the desired signal. Two methods to reduce background emission are described: one with low emission materials and the other with interference coating design. The first uses platforms composed of material that is transparent to mid-infrared light and therefore of low emissivity. Heating elements are embedded in the periphery of the heater. The transparent platform is composed of aluminum oxide, which is largely transparent for wavelengths less than about 8 μ m. In the luminescent microscopy used to test the heater, an optical aperture blocks emission from the heating coils while passing light from the heated objects on the transparent center of the microheater. The amount of infrared light transmitted through the aperture was reduced by 90% as the aperture was moved from the highly emissive heater coils at 450 ^∘C to the largely transparent center at the same temperature. The second method uses microheaters with integrated multilayer interference structures designed to limit background emission in the spectral range of the low-light luminescence object being measured. These heaters were composed of aluminum oxide, titanium dioxide, and platinum and were operated over a large range of temperatures, from 50 ^∘C to 600 ^∘C. At 600 ^∘C, they showed a background photon emission only 1/800 that of a comparison heater without the multilayer interference structure. In this structure, the radiation background was sufficiently reduced to easily monitor weak thermoluminescent emission from CaSO 4 :Ce,Tb microparticles.
To the uninitiated, the phrase “optical microelectromechanical systems”or optical MEMS must appear to refer to a field of incredible specialization. Ironically, the number of disciplines involved, optics, mechanics, and electronics, make the field most accessible to scientists of great technical breadth. This is especially true when optical MEMS is used in chemical and biological applications - the theme of this text. Underlying all of them is the technology of microfabrication. One chapter could not possibly cover all of the techniques developed over the decades for very-large-scale integration (VLSI) and general MEMS systems. Indeed there are entire textbooks devoted specifically to both types. In this chapter then, we present the characteristics of fabrication and design that are specific to bring optics into the system. In particular, there are a number of materials and fabrication techniques that are specific to optical MEMS systems. When dealing with light, one may have to handle visible, ultraviolet, or infrared portions of the spectrum, each of which has its own special set of optimal substances. Since one often has to emit light or detect it in special wavelength regions, semiconductors other than silicon often must be incorporated, each with their own set of wet and dry chemical etching techniques and their own set of mechanical properties. Standard mechanical characteristics that play no role in “normal”MEMS systems may prove problematic in optical MEMS. For example small size may lead to diffraction, typical surface roughness may limit optical cavity resolution, and mechanical or motion may deform mirrors to limit the number of resolvable spots. Even thermal noise may place limits on optical design. Each of these topics is covered in the pages that follow. For the reader who is interested in further exploring many of these areas, we recommend the text by Solgaard.
Under low light conditions, high temperature measurements of luminescence are limited by the overlap of the thermal emission spectra and the luminescent emission spectra being measured. A solution to this is to have a heat source that can be designed not to emit in a certain wavelength range(s) by coating it with an interference multilayer. The multilayer effectively changes the emissivity of the heat source. Microheaters made from aluminum oxide platforms with platinum heating elements were coated with aluminum oxide and titanium oxide multilayers. This multilayer structure was used to measure the thermoluminescence of CaSO4:Ce,Tb up to 420^∘C. They also showed a thermal emission background 800 times lower at 600^∘C than the same microheater with no multilayer structure.
Infrared-transparent microheaters have been constructed to reduce the background blackbody radiation produced by the heater. Among other applications, such heaters allow one to probe the high temperature peaks of thermoluminescent(TL) materials. The microheater consists of peripheral platinum heating elements on a mid-infrared transparent alumina platform. Alumina has a relatively low blackbody signal at high temperature for wavelengths less than 8μm. To test the reduced blackbody emission, an aperture was placed over the heating coils and then the transparent center of the microheater. The amount of infrared light transmitted through the aperture was reduced by 90% as the aperture moved from the highly emissive heater coils at 450^∘C to the largely transparent center at the same temperature.
Most thermoluminescent materials are created using crystal growth techniques; however, it would be of great utility to identify those few thermoluminescent materials that can be deposited using simpler methods, for example to be compatible with the early portions of a silicon integrated circuit or microelectromechanical fabrication process. In this work, thin films of yttrium oxide with a terbium impurity (Y2O3:Tb) were deposited on silicon wafers by electron beam evaporation. The source for the Y2O3:Tb was made by combining Y2O3 and Tb4O7 powders. The approximate thicknesses of the deposited films were 350 nm. After deposition, the films were annealed at 1100 ^∘C for 30 s to improve crystallinity. There is a strong correlation between the x-ray diffraction (XRD) peak intensity and the thermoluminescent glow curve intensity. The glow curve displays at least two peaks at 140 ^∘C and 230 ^∘C. The emission spectra was measured using successive runs with a monochromator set to a different wavelength for each run. There are two main emission peaks at 490 nm and 540 nm. The terbium impurity concentration of approximately 1 mol% was measured using Rutherford backscattering spectrometry (RBS). The Y2O3:Tb is sensitive to UV, x-ray, and gamma radiation. The luminescent intensity per unit mass of UV irradiated Y2O3:Tb was about 2 times that of x-ray irradiated TLD-100.
The thermoluminescence characteristics of a thin film of terbium-doped yttrium oxide change upon repeated stress application through electrostatic actuation. A maximum 42% decrease in the intensity of two thermoluminescent peaks is seen when voltage is applied in 5V increments to 25V, translating to 0.15 μm of center deflection. While the overall intensity decreases, the higher temperature peak - corresponding to deeper traps - is affected more than the lower temperature one. Two possible physical explanations for the behavior are mechanical stress and dielectric charging.
Thermoluminescent (TL) particles show promise as robust direct-contact thermal history sensors for explosive events. Research with microheaters has shown that TL microparticles can measure temperature excursions of hundreds of degrees; however, microheaters do not generate the severe pressure and shock stimuli present in post- detonation environments. To address this, TL particles were tested under conditions produced by the detonation of an aluminized explosive formulation. TLD-100 (LiF:Mg,Ti) powder was irradiated with 220 Gy of gamma radiation from a ^167Cs source before being exposed to the free field detonation of a 20 gram charge. Particles were recovered post-detonation from two separate tests and their TL glow curves measured. At least two TL emission peaks 50 ^oC apart are clearly distinguishable in both samples, with peak intensity ratios decreasing 33.7% and 60.0% from an original 8.88:1, indicative of distinct carrier traps emptying at rates depending on the trap energy. These ratios agree well with thermocouple measurements from within the post-detonation fireball.